An edition of Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing in Materials) (2005)
Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing in Materials)
By David G. Bucknall
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Publish Date
January 2005
Publisher
Woodhead Publishing,
Language
eng
Pages
409
Description:
subjects: Nanotechnology, Nanolithography, Microlithography, Nanotecnologia, Lithography