Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films

An edition of Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films (1986)

Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films

By John J. Pouch

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Publish Date

1986

Publisher

National Aeronautics and Space Administration, Lewis Research Center

Language

eng

Pages

Description:

subjects: Amorphous materials, Amorphous semiconductors, Boron nitride, Boron nitrides, Carbon, Dielectrics, Plasma diodes, Semiconductor devices