An edition of Silicon Materials--Processing, Characterization and Reliability (Materials Research Society Symposia Proceedings, 716.) (2002)
Silicon materials--processing, characterization and reliability
symposium held April 1-5, 2002, San Francisco, California, U.S.A.
By Janice L. Veteran
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Publish Date
2002
Publisher
Materials Research Society
Language
eng
Pages
672
Description:
subjects: Semiconductors, Silicon, Congresses, Reliability, Silicon alloys