An edition of Pulsed and pulsed bias sputtering (2003)
Pulsed and pulsed bias sputtering
principles and applications
By Edward V. Barnat,Toh-Ming Lu
0 (0 Ratings)
0 Want to read0 Currently reading0 Have read
0 Want to read0 Currently reading0 Have read
Publish Date
2003
Publisher
Kluwer Academic
Language
eng
Pages
165
Description:
subjects: Cathode sputtering (Plating process), Thin films, Semi-conductors & super-conductors, Physics, Electronics - Semiconductors, Science, Technology & Industrial Arts, Science/Mathematics, Engineering - General, Material Science, Science : Physics, Technology / Engineering / General, Technology / Optics, Technology : Material Science, General, Cathode sputtering (Plating pr