An edition of High resolution focused ion beams (2002)
High resolution focused ion beams
FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
By Jon Orloff,Lynwood Swanson,Mark Utlaut
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Publish Date
2003
Publisher
Kluwer Academic/Plenum Publishers,Springer
Language
eng
Pages
303
Description:
subjects: Industrial applications, Ion bombardment, Focused ion beams