An edition of Integrated Circuit Metrology, Inspection, and Process Control (1987)

Integrated circuit metrology, inspection, and process control

[papers]

By Kevin M. Monahan

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Publish Date

1987

Publisher

SPIE--the International Society for Optical Engineering

Language

eng

Pages

329

Description:

subjects: Integrated circuits, Weights and measures, Congresses, Measurement, Process control, Engineering inspection, Quality control, Optical methods