An edition of Advances in Resist Technology and Processing XVII (Advances in Resist Technology & Processing) (2000)
Advances in Resist Technology and Processing XVII (Advances in Resist Technology & Processing)
By Francis M. Houlihan
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Publish Date
July 2000
Publisher
SPIE-International Society for Optical Engine
Language
eng
Pages
1252
1-2 of 2 Editions
Advances in resist technology and processing XVII28 February-1 March, 2000, Santa Clara, USA
Language: eng
Pages: 1252
Published In: 2000
Publisher: SPIE
Advances in Resist Technology and Processing XVII (Advances in Resist Technology & Processing)
Language: eng
Published In: July 2000
Publisher: SPIE-International Society for Optical Engine