Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)

An edition of Soft X-Ray Projection Lithography (Proceedings Series, Vol 12) (1991)

OSA proceedings on soft-x-ray projection lithography

proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California

By Jeffrey Bokor

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Publish Date

1991

Publisher

Optical Society of America

Language

eng

Pages

251

Description:

subjects: Congresses, X-ray lithography