1-8 of 8 Books

Rapid thermal annealing/chemical vapor deposition and integrated processing
By Martin L. Green,Jeffrey C. Gelpey

Materials and processes for surface and interface engineering
By Y. Pauleau
IPAT 77
IPAT 77
By IPAT 77 (1977 Edinburgh, Scotland)

Studies on chemical vapor deposition in the gallium indium arsenide phosphide system
By Chinho Park

Rapid thermal and related processing techniques
By
CVD-XI
CVD-XI
By International Conference on Chemical Vapor Deposition (11th 1990 Seattle, Wash.)

Monitoring and control of plasma-enhanced processing of semiconductors
By James E. Griffiths