Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers

An edition of Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers (1995)

Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers

By D. J. Larkin

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Publish Date

1995

Publisher

National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Silicon, Vapor deposition, Additives, Nitrogen, Epitaxy