Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
An edition of Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers (1995)
By D. J. Larkin
Publish Date
1995
Publisher
National Aeronautics and Space Administration,National Technical Information Service, distributor
Language
eng
Pages
-
1-4 of 4 Editions
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Language: eng
Published In: 1995
Publisher: National Aeronautics and Space Administration, National Technical Information Service, distributor
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Language: eng
Published In: 1995
Publisher: National Aeronautics and Space Administration, National Technical Information Service, distributor
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Language: eng
Published In: 1995
Publisher: National Aeronautics and Space Administration, National Technical Information Service, distributor
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Language: eng
Published In: 1995
Publisher: National Aeronautics and Space Administration, National Technical Information Service, distributor