Dian zi shu sao miao pu guang ji shu
An edition of Dian zi shu sao miao pu guang ji shu (1985)
By Kehua Wu
Publish Date
1985
Publisher
Yu hang chu ban she,Xin hua shu dian Beijing fa xing suo fa xing
Language
chi
Pages
425
Description:
subjects: Electron Lithography, Electron beams, Ion beam lithography, Ion bombardment, Lithography, Electron