Explore Books on
ion beam lithography

Methods and Materials in Microelectronic Technology

By Joachim Bargon

Rapid Prototyping & Manufacturing

By Paul F. Jacobs

Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)

By Arnold W. Yanof

Electron-Beam, X-Ray, and Ion-Beam Technology

By Douglas J. Resnick

Ion tracks and microtechnology

By Reimar Spohr

Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii

By V. K. Popov

Dry processing for submicrometer lithography

By

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV

By

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV

By

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

By International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)

Dian zi shu sao miao pu guang ji shu

By Kehua Wu

Stereolithography and other RP&M technologies

By Paul F. Jacobs

Ju jiao li zi shu wei na jia gong ji shu

By Wenqi Gu

Dian zi shu bao guang wei na jia gong ji shu

By Wenqi Gu

The physics of submicron lithography

By Kamilʹ Akhmetovich Valiev

A fast ion beam pattern generator

By Hendrik Nicolaas Slingerland

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III

By

Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing

By

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II

By

Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V

By

Electron-beam, x-ray, and ion-beam lithographies VI

By

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III

By

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

By

Patterning of material layers in submicron region

By U. S. Tandon