An edition of Silicon micromachining (1998)
Silicon micromachining
By M. Elwenspoek,M. Elwenspoek,H. V. Jansen
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Publish Date
1998
Publisher
Cambridge University Press
Language
eng
Pages
413
Description:
subjects: Silicon, Micromachining, Etching, Electronic devices & materials, Technology, Microelectronics, Semiconductor Physics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - General, Engineering - Electrical & Electronic, Material Science, Technology / Engineering / Electrical, Electronics - Microelectronics, Semiconductors, Etching, technique