Semiconductor industry
An edition of Semiconductor industry (2005)
wafer fab exhaust management
By J. Michael Sherer
Publish Date
2005
Publisher
Taylor & Francis
Language
eng
Pages
194
Description:
subjects: Air, Design and construction, Environmental aspects, Environmental aspects of Semiconductor industry, Environmental aspects of Volatile organic compounds, Purification, Semiconductor industry, Semiconductor wafers, Technological innovations, Volatile organic compounds, Épuration, Innovations, Semi-conducteurs, Industrie, Aspect de l'environnement, Composés organiques volatils, TECHNOLOGY & ENGINEERING, Electronics, Solid State, Semiconductors