An edition of Silicon nitride, silicon dioxide thin insulating films, and other emerging diele[c]trics VIII (2005)
Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005
By Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (8th 2005 Québec, Québec)
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Publish Date
June 2005
Publisher
Electrochemical Society
Language
eng
Pages
588
Description: