Microcircuit engineering 91
An edition of Microcircuit engineering 91 (1992)
Proceedings of the International Conference on Microlithography September 17-19, 1991 Rome, Italy
By International Conference on Microlithography (1991 Rome, Italy),A. Tucciarone,A. Paoletti
Publish Date
March 1992
Publisher
Elsevier Science Publishing Company
Language
eng
Pages
582
Description:
subjects: Electronics - Microelectronics, Engineering - Electrical & Electronic, Logic Design, Circuits & components, Electronic devices & materials, Materials science, Electronic Circuits, Technology & Industrial Arts, Science/Mathematics, Integrated circuits, Very large scale integration, Design and construction, Congresses, Microlithography