An edition of Gate stack and silicide issues in silicon processing (2000)
Gate Stack and Silicide Issues in Silicon Processing
Symposium Held April 25-27, 2000, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 611.)
By Symposium on Gate Stack and Silicide Issues in Silicon Processing (2000 San Francisco, CA)
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Publish Date
July 2000
Publisher
Materials Research Society
Language
eng
Pages
236
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