Silicon nitride, silicon dioxide, and emerging dielectrics 9

An edition of Silicon nitride, silicon dioxide, and emerging dielectrics 9 (2007)

Silicon nitride, silicon dioxide, and emerging dielectrics 9

By Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)

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Publish Date

2007

Publisher

Electrochemical Society

Language

eng

Pages

847

Description:

subjects: Thin film devices, Silicon nitride, Electric insulators and insulation, Silicon dioxide, Congresses, Thin films, Dielectric films, Silica