An edition of Introductory MEMS (2008)
Introductory MEMS
fabrication and applications
By Thomas M. Adams
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Publish Date
2010
Publisher
Springer
Language
eng
Pages
460
Description:
subjects: Microelectromechanical systems, Electronic apparatus and appliances, MEMS, Transducers, Computer programs, Computer science, Parallel processing (Electronic computers), Congresses, Semantics, Programming languages (Electronic computers), Programming languages (electronic computers), Sequential machine theory, Formal languages, Sequential machine theory--congresses, Formal languages--congresses