Explore Books on
mems

Optical inspection of microsystems

By Wolfgang Osten

MEMS

By Jan Korvink,Oliver Paul

Nano-bio-electronic, photonic and MEMS packaging

By C. P. Wong,Kyoung-Sik Moon,Yi Li

Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

By Rainee N. Simons

Photonic Microsystems

By Olav Solgaard

Introductory MEMS

By Thomas M. Adams

Bits on Chips

By Harry Veendrick

Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks)

By Hwaiyu Geng

Foundations of MEMS

By Liu, Chang Ph.D.

BioNanoFluidic MEMS (MEMS Reference Shelf)

By Peter J. Hesketh

BioMEMS and biomedical nanotechnology

By Mauro Ferrari

Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

By Rainee Simons