Explore Books on
mems

Optical inspection of microsystems

By Wolfgang Osten

Handbook Of Wafer Bonding

By Peter Ramm

MEMS

By Jan Korvink,Oliver Paul

Nano-bio-electronic, photonic and MEMS packaging

By C. P. Wong,Kyoung-Sik Moon,Yi Li

Photonic Microsystems

By Olav Solgaard

Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

By Rainee N. Simons

Introductory MEMS

By Thomas M. Adams

Bits on Chips

By Harry Veendrick

Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks)

By Hwaiyu Geng

BioNanoFluidic MEMS (MEMS Reference Shelf)

By Peter J. Hesketh

Foundations of MEMS

By Liu, Chang Ph.D.

Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

By Rainee Simons

BioMEMS and biomedical nanotechnology

By Mauro Ferrari

Konzeption, Realisierung und Bewertung eines Prozesses zur Integration von MEMS in Polymer

By Johanna F. May