An edition of Optical inspection of microsystems (2006)
Optical inspection of microsystems
By Wolfgang Osten
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Publish Date
2006
Publisher
Taylor & Francis
Language
eng
Pages
503
Description:
subjects: Optical detectors, Optical methods, Quality control, Industrial applications, Microelectronics, Engineering inspection, Optical measurements, Interferometry, Qualité, Contrôle, Méthodes optiques, Détecteurs optiques, Microsystèmes électromécaniques, Dispositifs optoélectroniques, Contrôle technique, Automatisation, TECHNOLOGY & ENGINEERING, Industrial Engineering, MEMS, Mikrosystemtechnik, Optische Analyse