An edition of Ultraclean surface processing of silicon wafers (1998)

Ultraclean Surface Processing of Silicon Wafers

Secrects of VLSI Manufacturing

By S. Heusler

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Publish Date

October 30, 1998

Publisher

Springer

Language

eng

Pages

616

Description:

subjects: Silicon, Surfaces, Cleaning, Semiconductor wafers, Surface preparation, Semiconductors, Surfaces (physics), Integrated circuits, very large scale integration