An edition of Particle control for semiconductor manufacturing (1990)

Particle control for semiconductor manufacturing

By R. P. Donovan

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Publish Date

1990

Publisher

M. Dekker

Language

eng

Pages

464

Description:

subjects: Particles, Semiconductors, Defects, Design and construction, Semi-conducteurs, Défauts, Particules (Matière), TECHNOLOGY & ENGINEERING, Electronics, Solid State