An edition of Advanced metallization for future ULSI (1996)

Advanced metallization for future ULSI

symposium held April 8-11, 1996, San Francisco, California, U.S.A.

By K. N. Tu

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Publish Date

1996

Publisher

Materials Research Society

Language

eng

Pages

597

Description:

subjects: Congresses, Metallic films, Ultra large scale integration, Metallizing, Semiconductors, Integrated circuits, Design and construction, Metallography, Integrated circuits, very large scale integration