Explore Books on
ultra large scale integration

Advanced interconnects for ULSI technology

By Mikhail Baklanov,P. S. Ho,Ehrenfried Zschech

Analysis and design of digital integrated circuits

By David A. Hodges

Mega-Bit Memory Technology - from Mega-Bit to Giga-Bit

By Hiroyuki Tango

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

By Golla Eranna

Characterization and metrology for ULSI technology, 2000

By David G. Seiler

Advanced Metallization for ULSI Applications

By Virendra Vir Singh Rana

Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A

By S. A. Campbell

Reduced Thermal Processing for ULSI

By R.A. Levy

Group IV Semiconductor Nanostructures: 2006

By Leonid Tsybeskov

Characterization and metrology for ULSI technology

By International Conference on Characterization and Metrology for ULSI Technology (2003 Austin, Tex.)

CMOS/BiCMOS ULSI

By Kiat Seng Yeo

Characterization and metrology for ULSI technology

By International Conference on Characterization and Metrology for ULSI Technology (2005 Richardson, Tex.)

Gate stack and silicide issues in silicon processing

By Symposium on Gate Stack and Silicide Issues in Silicon Processing (2000 San Francisco, CA)

Electrochemical processes in ULSI and MEMS

By Symposium on Electrochemical Processes in ULSI and MEMS (2004 San Antonio, Tex.)

ULSI science and technology/1997

By International Symposium on Ultra Large Scale Integration Science and Technology (6th 1997 Montréal, Québec)

ULSI science and technology, 1993

By International Symposium on Ultra Large Scale Integration Science and Technology (4th 1993 Honolulu, Hawaii)

Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications

By John E. J. Schmitz

Advanced metallization for future ULSI

By K. N. Tu

Advanced metallization and interconnect systems for ULSI applications in 1996

By Robert Havemann

Sub-half-micron lithography for ULSIs

By Shinji Matsui

ULSI process integration 5

By International Symposium on ULSI Process Integration (5th 2007 Washington, DC)

Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI

By International Symposium on Patterning Science and Technology (2nd 1991 Phoenix, Ariz.)

Testing and diagnosis of VLSI and ULSI

By NATO Advanced Study Institute on Testing and Diagnosis of VLSI and ULSI (1987 Como, Italy)

Advanced metallization and interconnect systems for ULSI applications in 1995

By Shi-Qing Wang