Explore Books on
ultra large scale integration

Advanced interconnects for ULSI technology

By Mikhail Baklanov,P. S. Ho,Ehrenfried Zschech

Mega-Bit Memory Technology - from Mega-Bit to Giga-Bit

By Hiroyuki Tango

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

By Golla Eranna

Analysis and design of digital integrated circuits

By David A. Hodges

Characterization and metrology for ULSI technology, 2000

By David G. Seiler

Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A

By S. A. Campbell

Group IV Semiconductor Nanostructures: 2006

By Leonid Tsybeskov

CMOS/BiCMOS ULSI

By Kiat Seng Yeo

Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications

By John E. J. Schmitz

Advanced metallization and interconnect systems for ULSI applications in 1995

By Shi-Qing Wang

ULSI semiconductor technology atlas

By Chih-Hang Tung,George T. T. Sheng,Chih-Yuan Lu

Materials, integration and technology for monolithic instruments

By Jeremy A. Theil

ULSI process integration 5

By International Symposium on ULSI Process Integration (5th 2007 Washington, DC)

Electrochemical processes in ULSI and MEMS

By Symposium on Electrochemical Processes in ULSI and MEMS (2004 San Antonio, Tex.)

New Approaches To Image Processing Based Failure Analysis Of Nanoscale Ulsi Devices

By Eran Gur

ULSI science and technology/1997

By International Symposium on Ultra Large Scale Integration Science and Technology (6th 1997 Montréal, Québec)

Characterization and metrology for ULSI technology

By International Conference on Characterization and Metrology for ULSI Technology (2005 Richardson, Tex.)

Sub-half-micron lithography for ULSIs

By Shinji Matsui

Advanced metallization for ULSI applications, 1992

By

Advanced metallization for ULSI applications in 1993

By Yosi Shacham-Diamand

Characterization and metrology for ULSI technology

By International Conference on Characterization and Metrology for ULSI Technology (2003 Austin, Tex.)

Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI

By International Symposium on Patterning Science and Technology (2nd 1991 Phoenix, Ariz.)

ULSI science and technology, 1993

By International Symposium on Ultra Large Scale Integration Science and Technology (4th 1993 Honolulu, Hawaii)

Advanced Metallization for ULSI Applications

By Virendra Vir Singh Rana