An edition of Interconnect and contact metallization for ULSI (2000)
proceedings of the international symposium
By G. S. Mathad
Publish Date
2000
Publisher
Electrochemical Society
Language
eng
Pages
340
Description:
subjects: Electric contacts, Dielectrics, Copper, Electrochemical metallizing, Design and construction, Materials, Congresses, Integrated circuits, Ultra large scale integration, Electric conductivity, Plasma-enhanced chemical vapor deposition