An edition of Characterization of plasma-enhanced CVD processes (1990)
Characterization of Plasma-Enhanced Cvd Processes
Symposium Held November 27-28, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
By Dale E. Ibbotson,Dennis W. Hess,Gerald Lucovsky
0 (0 Ratings)
0 Want to read0 Currently reading0 Have read
0 Want to read0 Currently reading0 Have read
Publish Date
June 1990
Publisher
Materials Research Society
Language
eng
Pages
250