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Cover of Characterization of plasma-enhanced CVD processes

Characterization of Plasma-Enhanced Cvd Processes

Symposium Held November 27-28, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)

By Dale E. Ibbotson,Dennis W. Hess,Gerald Lucovsky

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Publish Date

June 1990

Publisher

Materials Research Society

Language

eng

Pages

250