An edition of Chemical perspectives of microelectronic materials III (1993)

Chemical Perspectives of Microelectric Materials III

Symposium Held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)

By C. R. Abernathy,C. W., Jr. Bates,D. A. Bohling

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Publish Date

April 1993

Publisher

Materials Research Society

Language

eng

Pages

727

Description:

subjects: Surface chemistry, Materials, Congresses, Semiconductors, Microelectronics, Electronics - Microelectronics, Chemical Properties Of Materials, Electronic Apparatus And Devices, Technology, Science/Mathematics, TEC008070, TEC, Materials, research