An edition of Materials, integration and technology for monolithic instruments (2005)

Materials, integration and technology for monolithic instruments

symposium held March 29-30, 2005, San Francisco, California, USA

By Jeremy A. Theil

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Publish Date

2005

Publisher

Materials Research Society

Language

eng

Pages

179

Description:

subjects: Metallic films, Metallizing, Semiconductors, Thin films, Design and construction, Materials, Congresses, Ultra large scale integration, Integrated circuits