An edition of Handbook of plasma processing technology (1990)
Handbook of Plasma Processing Technology
Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)
By Stephen M. Rossnagel,Jerome J. Cuomo,William D. Westwood
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Publish Date
January 1, 1990
Publisher
Noyes Publications
Language
eng
Pages
523
Description:
subjects: Plasma engineering, Semiconductors, Etching, Plasma etching