Explore Books on
plasma etching

Plasma deposition, treatment, and etching of polymers

By Orlando Auciello,Daniel L. Flamm

Materials modification by energetic atoms and ions

By Materials Research Society. Meeting Symposium.,Kenneth S. Grabowski,Scott A. Barnett

1997 2nd International Symposium on Plasma Process-Induced Damage

By International Symposium on Plasma Process-Induced Damage (2nd 1997 Monterey, Calif.),Calif.) International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey,Kin P. Cheung,Moritaka Nakamura,Calvin T. Gabriel

Photons and low energy particles in surface processing

By James H. Brannon,Carol H. Ashby

Plasma Processing of Semiconductors

By P.F. Williams

Principles of plasma discharges and materials processing

By M. A. Lieberman

Dry Etching Technology for Semiconductors

By Kazuo Nojiri

Plasma-surface interactions and processing of materials

By NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 Alicante, Spain)

Photon-assisted processing of surfaces and thin films

By Symposium B on Photon-Assisted Processing of Surfaces and Thin Films (1994 Strasbourg, France),J. Dieleman,U. K. P. Biermann

Microstructural characterization of reaction-formed silicon carbide ceramics

By M. Singh

Thin film materials, processes, and reliability

By International Symposium on Thin Film Materials, Processes, and Reliability (2003 Paris, France),G. Mathad,T. Cale,H. Rathore

Materials surface processing

By Symposium B on Laser, Lamp, and Synchrotron Assisted Materials Surface Processing (1992 Strasbourg, France),M. Stuke,Ernesto E. Marinero

Photon, beam, and plasma stimulated chemical processes at surfaces

By Irving P. Herman

Plasma processing XIII

By Symposium on Plasma Processing (13th 2000 Toronto, Ont.)

Introduction to microlithography

By Larry F. Thompson,Murrae J. Bowden,C. Grant Willson

Dry etching for VLSI

By A. J. van Roosmalen

Plasma Etching Processes for Interconnect Realization in VLSI

By Nicolas Posseme

Feature profile evolution in plasma processing using on-wafer monitoring system

By Seiji Samukawa

Papers from the International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (BANPIS '97)

By International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (1997 Tanabe-shi, Japan)

Dry etch technology

By

Handbook of plasma processing technology

By Stephen M. Rossnagel,Jerome J. Cuomo,William D. Westwood

Plasma synthesis and etching of electronic materials

By B. Abeles

Plasma processing and synthesis of materials III

By Diran Apelian,Julian Szekely

Low Pressure Plasmas and Microstructuring Technology

By Gerhard Franz