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Cover of Handbook of semiconductor interconnection technology

Handbook of semiconductor interconnection technology

By Schwartz

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Publish Date

1998

Publisher

Marcel Dekker

Language

eng

Pages

577

Description:

This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.