An edition of Advanced metallization for ULSI applications, 1992 (1993)

Advanced metallization for ULSI applications, 1992

proceedings of the conference held October 20-22, 1992, in Tempe, Arizona

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Publish Date

1993

Publisher

Materials Research Society.

Language

eng

Pages

404

Description:

subjects: Metallic films, Electrochemical metallizing, Vapor deposition, Materials, Congresses, Ultra large scale integration, Tungsten, Integrated circuits