Cover of Handbook of Silicon Based MEMS Materials and Technologies

An edition of Handbook of Silicon Based MEMS Materials and Technologies (2009)

Handbook of Silicon Based MEMS Materials and Technologies

By Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Matthias Petzold,Horst Theuss

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

0 Want to read0 Currently reading0 Have read

Publish Date

2015

Publisher

Elsevier Science & Technology Books,William Andrew

Language

eng

Pages

826

Description:

subjects: Microelectromechanical systems, Silicon, Electronic apparatus and appliances, design and construction, Materials, Electric properties, Micro-Electrical-Mechanical Systems, Microsystèmes électromécaniques, Matériaux, TECHNOLOGY & ENGINEERING, Mechanical