An edition of Handbook of Silicon Based MEMS Materials and Technologies (2009)
Handbook of Silicon Based MEMS Materials and Technologies
By Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Matthias Petzold,Horst Theuss
Publish Date
2015
Publisher
Elsevier Science & Technology Books,William Andrew
Language
eng
Pages
826
1-5 of 5 Editions
Handbook of Silicon Based MEMS Materials and Technologies
Language: eng
Pages: 826
Published In: 2015
Publisher: Elsevier Science & Technology Books
Handbook of Silicon Based MEMS Materials and Technologies
Language: eng
Pages: 668
Published In: 2009
Publisher: Elsevier Science & Technology Books
Language: eng
Pages: 826
Published In: 2015
Publisher: Elsevier Science & Technology Books, William Andrew
Handbook of Silicon Based MEMS Materials and Technologies
Language: eng
Published In: 2020
Publisher: Elsevier
Handbook of Silicon Based MEMS Materials and Technologies
Language: eng
Pages: 1104
Published In: 2020
Publisher: Elsevier