An edition of X-ray metrology in semiconductor manufacturing (2006)
X-ray metrology in semiconductor manufacturing
By D. Keith Bowen
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Publish Date
2006
Publisher
Taylor & Francis
Language
eng
Pages
-
Description:
subjects: Fluroscopy, X-rays, Semiconductor wafers, Semiconductors, Diffraction, Design and construction, Quality control, Measurement, Inspection, Integrated circuits, X-rays, diffraction, Plaquettes à gravure en semi-conducteurs, Rayons X, X-ray diffraction, TECHNOLOGY & ENGINEERING, Electronics, Solid State