Gate Stack and Silicide Issues in Silicon Processing

Volume 611

By L. A. Clevenger,S. A. Campbell,P. R. Besser,S. B. Herner,J. Kittl

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Publish Date

2014

Publisher

University of Cambridge ESOL Examinations

Language

eng

Pages

254

Description:

subjects: Integrated circuits, ultra large scale integration, Silicides, Gate array circuits, Electric action of points