Ju jiao li zi shu wei na jia gong ji shu
An edition of Ju jiao li zi shu wei na jia gong ji shu (2006)
By Wenqi Gu
Publish Date
2006
Publisher
Beijing gong ye da xue chu ban she
Language
chi
Pages
344
Description:
subjects: Ion bombardment, Industrial applications, Ion beam lithography, Nanostructures, Nanotechnology, Microlithography