An edition of Stress induced phenomena in metallization (1998)
fourth international workshop, Tokyo, Japan, June, 1997
By P. S. Ho
Publish Date
1998
Publisher
American Institute of Physics
Language
eng
Pages
519
Description:
subjects: Thin film devices, Metallic films, Semiconductors, Electrochemical metallizing, Liquid crystal devices, Congresses, Defects, Electrodiffusion, Acoustic surface wave devices, Aluminum films, Integrated circuits