Emerging Lithographic Technologies for Nanopatterning

An edition of Emerging Lithographic Technologies for Nanopatterning (2008)

Emerging Lithographic Technologies for Nanopatterning

By Ampere A. Tseng,Walt Trybula

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Publish Date

December 15, 2008

Publisher

CRC

Language

eng

Pages

700

Description:

subjects: Lithography, electron beam, X-ray lithography, X-rays, industrial applications, Masks (electronics), Nanostructures, Nanotechnology