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lithography electron beam

Emerging Lithographic Technologies for Nanopatterning

By Ampere A. Tseng,Walt Trybula

Emerging Lithographic Techniques VI

By Roxann L. Engelstad

Emerging Lithographic Technologies 9

By R. Scott Mackay

Emerging lithographic technologies V

By Elizabeth A. Dobisz

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV

By

Design technology co-optimization in the era of sub-resolution IC scaling

By Lars W. Liebmann

Handbook of Nanofabrication

By Gary Wiederrecht

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

By International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)

Microcircuit Engineering 80

By International Conference on Microlithography (1980 Amsterdam, The Netherlands)

Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams

By International Symposium on Electron, Ion, and Photon Beams (1st 1983 Los Angeles, Calif.)

Alternative Lithographic Technologies VIII

By Christopher Bencher

The physics of submicron lithography

By Kamilʹ Akhmetovich Valiev

Emerging lithographic technologies VIII

By R. Scott Mackay

Emerging lithographic technologies

By

Emerging Lithographic Technologies XII

By Frank Schellenberg

Emerging Lithographic Technologies VII

By Roxann L. Engelstad

Advances in Resist Technology and Processing XXIII

By Qinghuang Lin

Emerging lithographic technologies IV

By Elizabeth A. Dobisz

Emerging lithographic technologies III

By

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V

By

EUV, X-ray, and neutron optics and sources

By Carolyn MacDonald,Kenneth Goldberg,Juan Maldonado

Handbook of nanofabrication

By Gary P. Wiederrecht

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI

By

Digest of papers, XEL '1997

By International Workshop on X-ray and Extreme Ultraviolet Lithography (1997 Yokohama, Japan)