Tungsten and Other Advanced Metals for Ulsi Applications in 1990

An edition of Tungsten and Other Advanced Metals for Ulsi Applications in 1990 (1991)

Tungsten and Other Advanced Metals for Ulsi Applications in 1990

Materials Research Society Conference Proceedings

By G. C. Smith

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Publish Date

March 1991

Publisher

Materials Research Society

Language

eng

Pages

395

Description:

subjects: Tungsten, Integrated circuits, ultra large scale integration, Integrated circuits, Very large scale integration, Materials, Congresses, Heat resistant alloys