An edition of Sub-Half-Micron Lithography for ULSIs (2005)

Sub-Half-Micron Lithography for ULSIs

By Katsumi Suzuki,Shinji Matsui

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Publish Date

November 10, 2005

Publisher

Cambridge University Press

Language

eng

Pages

341

Description:

subjects: Microlithography, Integrated circuits, ultra large scale integration, Printed circuits