Photon-assisted processing of surfaces and thin films

An edition of Photon-assisted processing of surfaces and thin films (1995)

Photon-assisted processing of surfaces and thin films

proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994

By Symposium B on Photon-Assisted Processing of Surfaces and Thin Films (1994 Strasbourg, France),J. Dieleman,U. K. P. Biermann

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Publish Date

1995

Publisher

Elsevier

Language

eng

Pages

640

Description:

subjects: Congresses, Industrial applications, Surfaces (Technology), Photon beams, Lasers, Plasma etching, Plasma-enhanced chemical vapor deposition, Lasers, industrial applications