Solid modeling applied to three-dimensional semiconductor process simulation

An edition of Solid modeling applied to three-dimensional semiconductor process simulation (1995)

Solid modeling applied to three-dimensional semiconductor process simulation

By Marc Westermann

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Publish Date

1995

Publisher

Hartung-Gorre

Language

eng

Pages

125

Description:

subjects: Computer simulation, Very large scale integration, Semiconductors, Integrated circuits, Design and construction, Three-dimensional integrated circuits