An edition of Fundamentals of microfabrication (1997)
Fundamentals of microfabrication
the science of miniaturization
By Marc J. Madou
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Publish Date
2002
Publisher
CRC Press
Language
eng
Pages
723
Description:
subjects: Microelectromechanical systems, Industrial applications, Microelectronic packaging, Microelectronics, Machining, Lasers, Design and construction, Integrated circuits, Microstructure, Lasers, industrial applications, TECHNOLOGY & ENGINEERING, Mechanical, Microelectronics--design and construction, Lasers--industrial applications, Integrated circuits--design and construction, Microelectromechanical systems--design and construction, Tk7836 .m33 1997, 621.3815/2