An edition of 1996 1st International Symposium on Plasma Process-Induced Damage (1996)
1996 1st International Symposium on Plasma Process-Induced Damage
13-14 May 1996, Santa Clara, California, USA
By International Symposium on Plasma Process-Induced Damage (1st 1996 Santa Clara, Calif.)
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Publish Date
1996
Publisher
Northern California Chapter of the American Vacuum Society
Language
eng
Pages
237
Description: