Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry

An edition of Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry (1995)

Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry

By W. Murray Bullis

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Publish Date

1995

Publisher

U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology

Language

eng

Pages

Description:

subjects: Semiconductors, Optical methods, Testing, Semiconductor industry, Characterization

Places: United States